HiPIMS System
Obtenez une tarification personnalisée pour vos besoins spécifiques
- Manufacturer warranty included
- Calibration certificate on request
- Worldwide shipping and installation support
- Application specialists available before you buy
HiPIMS System: ToronHiPIMS™ 1000
High-Power Impulse Magnetron Sputtering (HiPIMS) System
The ToronHiPIMS™ 1000 is a fully automated high-power impulse magnetron sputtering platform built for research and production thin film deposition where high plasma ionization is essential. Adjustable-width, high-voltage pulses of 300 to 1000 VDC create an ionization density of 70 to 90%. The result is an ionized metal vapor flux that improves film density, adhesion, and conformality. The SS304 chamber, available in prismatic or cylindrical form from 30 to 60 cm, reaches a base pressure of 10⁻⁷ Torr and supports one to four HiPIMS sources. A touch screen and real-time LCD displays manage the automated deposition cycle from start to finish.
Pulsed-DC Cleaning, Synchronization, and Gas Control
An optional synchronized Pulsed-DC plasma cleans the substrate surface in situ before deposition. It removes native oxides and contaminants without breaking vacuum. Target-sample synchronization, combined with voltage, current, and timing monitoring, provides precise control over the pulse delivery sequence and helps optimize film structure in HiPIMS processes. Gas inputs regulated by mass flow meters and fitted with isolation valves accommodate Ar, N₂, and other process gases, enabling reactive HiPIMS deposition of nitrides, oxides, and carbides. An isolation valve lets the chamber hold vacuum between runs, which trims cycle-time overhead.
Substrate Heating, Rotation, and Thickness Monitoring
Substrate temperature is PID controlled from 50 to 600 °C, while rotation from 2 to 30 rpm promotes uniform film deposition across the substrate surface. A dual-channel controller supporting 1 to 4 QCMs tracks film thickness and deposition rate in real time at 0.1 Å/s, with averaged output across the sensors. Internal lighting is included, along with 120 °C baking capability for chamber conditioning and moisture removal before deposition. With a 75×120 cm footprint and lockable wheels, the system passes through standard 85 cm doorways.
HiPIMS System: ToronHiPIMS™ 1000 Applications
Where the HiPIMS System Delivers Results
The ToronHiPIMS™ 1000 serves thin film deposition work in which conventional magnetron sputtering cannot reach the density, adhesion, and conformality that advanced coatings and devices demand. A high ionization fraction, reactive gas capability, and target-sample synchronization make the system suitable for a wide range of materials and substrate geometries.
Key Application Areas
- Hard Coating and Wear-Resistant Film Deposition: HiPIMS deposition of TiN, CrN, TiAlN, DLC, and related hard coatings onto cutting tools, molds, and mechanical components, where high film density and strong adhesion are required.
- Optical Thin Film Research: Reactive HiPIMS deposition of TiO₂, SiO₂, and other optical oxide coatings, with excellent stoichiometry control and low optical scatter.
- Semiconductor and Microelectronics Research: Deposition of barrier layers, contact metals, and functional oxide films on wafer substrates that call for void-free, dense films at controlled substrate temperatures.
- Energy and Solar Cell Research: Reactive HiPIMS deposition of transparent conductive oxides, nitride absorbers, and functional contact layers for thin-film photovoltaic and energy storage research.
- Biomedical Implant Coating: HiPIMS deposition of biocompatible TiN, DLC, and related coatings onto implant surfaces, where strong adhesion and low defect density at the film-substrate interface matter.
- Diffusion Barrier and Encapsulation Layer Deposition: Deposition of dense, conformal nitride and oxide barrier layers for microelectronic packaging and OLED device encapsulation.
- Reactive Nitride and Carbide Film Research: Controlled reactive HiPIMS deposition of transition metal nitrides, carbides, and carbonitrides for materials science and surface engineering research programs.
HiPIMS System: ToronHiPIMS™ 1000 Key Features
Integrated High-Vacuum Thin Film Platform
The ToronHiPIMS™ 1000 combines high-voltage pulsed magnetron sputtering, PID substrate heating, MFM gas control, synchronized Pulsed-DC surface cleaning, and automated layer-by-layer deposition in a single high-vacuum system.
Plasma and Sputtering Source Features
- 70 to 90% Ionization Density with 300 to 1000 VDC Adjustable Pulses: Very high plasma ionization sets HiPIMS apart from conventional sputtering. It allows controlled ion energy at the substrate surface, which improves film density, adhesion, and conformality.
- 1 to 4 Configurable HiPIMS Sputtering Sources: Single-target or multi-target setups support single-material, co-sputtered, or sequenced multi-layer deposition within one vacuum cycle.
- Target-Sample Synchronization with Voltage-Current-Timing Display: Pulse timing between the target and substrate bias is synchronized, and voltage, current, and timing parameters appear in real time to support process optimization and reproducibility.
- Synchronized Pulsed-DC Plasma Surface Cleaning: In-situ substrate preparation with synchronized plasma removes native oxides and contaminants without breaking vacuum before deposition begins.
Control and Automation
- Fully Automatic Computer Control with Touch Screen: A touch screen panel manages all system operations automatically, with real-time LCD status display throughout the deposition process.
- Fully Automated Layer-by-Layer Deposition: Automated control handles each layer independently, supporting multi-layer process sequences without manual intervention.
Chamber and Vacuum Performance
- SS304 Chamber (30 to 60 cm, Prismatic or Cylindrical): A clean, electro-polished stainless steel chamber is offered in multiple sizes to suit different substrate and load configurations.
- Standard 1-inch, QF, CF, and ISO Feedthrough Ports: Configurable port options allow flexible integration of feedthroughs, gauges, and process access.
- Internal Lighting and 120 °C Baking Capability: Internal lighting enables visual chamber inspection, and the baking option removes moisture and conditions the chamber before high-purity runs.
- 10⁻⁷ Torr Base Pressure with Fast Pump-Down: The system reaches 10⁻⁶ Torr in 30 minutes. A turbomolecular and mechanical pump combination is standard, with a cryo-pump and dry pump available as options.
- Wide-Range Vacuum Control (1000 to 10⁻⁹ Torr): Integrated vacuum measurement and control covers the full pressure range for both process gas introduction and base vacuum monitoring.
- Vacuum Hold Between Runs: An isolation valve keeps the chamber under vacuum when idle, shortening pump-down time between successive experiments.
Substrate, Gas, and Thickness Control
- 50 to 600 °C PID Substrate Heating: PID-controlled substrate temperature across a wide range supports deposition at elevated temperatures for improved film crystallinity and adhesion.
- 2 to 30 rpm Adjustable Sample Rotation: Continuously adjustable rotation promotes an even film thickness distribution across the substrate during deposition.
- MFM Controlled Gas Inputs with Isolation Valves: Mass flow meter controlled delivery of Ar, N₂, and other process gases supports both inert and reactive HiPIMS processes, with Ar or N₂ chamber backfill.
- 0.1 Å/s Dual-Channel Thickness Monitoring with 1 to 4 QCMs: Precise deposition rate and cumulative thickness measurement is provided, with averaged-value output across multiple QCM sensors.
Cooling, Footprint, and Warranty
- Automatic Closed-Loop Water Cooling: Active water cooling manages heat from the power supplies, targets, and chamber walls throughout HiPIMS operation.
- 75×120 cm Mobile Platform: The 75×120 cm footprint and lockable wheels allow the system to pass through standard 85 cm doorways, offering flexible placement in laboratory and production environments.
- One-Year Full Warranty: Coverage includes design, materials, and workmanship.
HiPIMS System: ToronHiPIMS™ 1000 Theory and Method
How High-Power Impulse Magnetron Sputtering Works
HiPIMS delivers extremely high power densities to a magnetron target in short, high-voltage pulses, reaching instantaneous power levels far beyond those of conventional DC or RF sputtering. At peak pulse power, plasma density near the target climbs sharply, and a large fraction of the sputtered metal atoms is ionized before reaching the substrate. These ionized metal species move under the influence of plasma and applied bias fields, which allows control over deposition angle and improves film density on complex substrate geometries. Pulse width, voltage, and repetition rate can each be adjusted independently to suit the material and process.
Ionization Control and Target-Sample Synchronization
The 300 to 1000 VDC pulse range, together with adjustable pulse width, sets the ionization fraction for a given target. Ionization densities of 70 to 90% clearly separate HiPIMS from conventional sputtering, where most of the sputtered flux arrives at the substrate as neutral atoms with a broad angular distribution. Target-sample synchronization coordinates the arrival of ionized flux with the applied substrate bias, so ion energy at the growth surface can be controlled independently of the plasma condition. An optional synchronized Pulsed-DC mode applies the same pulse-gating approach to in-situ surface cleaning before deposition.
Reactive Deposition and Vacuum Conditioning
Reactive HiPIMS introduces N₂, O₂, or other reactive gases through MFM-controlled inputs, forming nitride, oxide, or carbide films from pure metal targets. The high ionization fraction lessens the hysteresis effect that limits rate stability in conventional reactive sputtering, which widens the stable process window. An isolation valve preserves chamber vacuum between depositions, and a 120 °C baking option conditions the chamber walls to support a low base pressure. A turbomolecular and mechanical pump combination, with cryo-pump and dry pump options, reaches a base pressure of 10⁻⁷ Torr.
HiPIMS System - ToronHiPIMS™ 1000 Technical Specifications
| Parameter | Specification |
|---|---|
| HiPIMS Pulse Voltage | 300 to 1000 VDC |
| HiPIMS Pulse Width | Adjustable |
| Plasma Ionization Density | 70 to 90% |
| Number of HiPIMS Sources | 1 to 4 (configurable) |
| Target-Sample Synchronization | Yes; voltage-current-timing display |
| Plasma Surface Cleaning | Synchronized Pulsed-DC plasma |
| Gas Inputs | Ar, N₂, and others; MFM controlled; isolation valves; Ar or N₂ backfill |
| Chamber Material | SS304 (prismatic or cylindrical) |
| Chamber Sizes | 30/40/50/60 cm box size |
| Chamber Surface Finish | Electro-polished |
| Feedthrough Ports | Standard 1-inch, QF, CF, ISO |
| Internal Lighting | Yes |
| Baking Capability | Up to 120 °C (internal) |
| Base Pressure | 10⁻⁷ Torr |
| Working Vacuum Level (Pump-Down Time) | 10⁻⁶ Torr in 30 minutes |
| Vacuum Control Range | 1000 to 10⁻⁹ Torr |
| Pump Configuration | Turbomolecular + Mechanical (cryo-pump and dry pump as options) |
| Sample Heating Range | 50 to 600 °C (PID controlled) |
| Sample Rotation Speed | 2 to 30 rpm |
| Thickness Monitoring | Dual-channel; 0.1 Å/s precision; 1 to 4 QCMs; averaged value |
| Cooling System | Automatic closed-loop water cooling |
| Control System | Fully automatic computer control; touch screen panel; real-time LCD |
| Footprint | 75 × 120 cm |
| Door Clearance | Passes through standard 85 cm doorway |
| Mobility | Lockable wheels |
| Warranty | 1 year (design, materials, and workmanship) |
Important Delivery Information
Delivery time varies upon stock availability. Our standard dispatch and shipping times are generally within 1 week, however for some high demand items the delivery may be extended to 2-3 weeks.
Need it urgently? Contact us here to check stock and organize faster shipping.
Orders:
Purchaser acknowledges that when placing an order on the Torontech:
A. the placing of the order signifies the purchaser's assent to place said order at the Torontech and that the order will be accepted by the successful processing of the order by Torontech WorldWide LC.
B. the purchaser typing their name when requested to do so by the Torontech constitutes a signature to contract
C. the purchaser has the full authority to enter into the contract for such entity, and such grant of authority was indicated by purchaser by placement of the order through the Torontech.
D. A minimum handling fee will be applied to the shipping total for all orders.
Shipping within the U.S.A.:
All orders will be shipped best way prepaid, via courier for smaller packages or via Freight forwarders for larger crates. A handling fee may be applicable to orders. Title to merchandise transfers to the purchaser upon delivery to the carrier. Loss or damage in transit is the responsibility of the purchaser. Torontech WorldWide will provide assistance with information needed for processing claims.
Shipping outside of the U.S.A.:
All orders will be shipped best way, via courier for smaller packages or via Freight forwarders for larger crates. A low handling fee may be applicable. Title to merchandise transfers to the purchaser upon delivery to the carrier. Loss or damage in transit is the responsibility of the purchaser. Torontech WorldWide will provide assistance with information needed for processing claims. Export fees, duties, taxes, and customs clearance are the responsibility of the purchaser.
Shipping insurance is not included, please contact our sales representatives if you need shipping insurance.
Partial shipment: Torontech WorldWide reserves the right to make partial shipments unless otherwise instructed by the purchaser.
Payment terms: All payments to Torontech WorldWide are to be made in U.S. Dollars (USD)
A. Credit Card - Torontech WorldWide will accept Visa, Master Card, AMEX or Discover. Required information from the purchaser is the credit card number, 3 digit security code, expiration date, card holder's name (exactly as it appears on the card), billing address, and valid telephone number for us to use in case of difficulty. Torontech WorldWide reserves the right to delay shipment pending verification of credit card validity.
B. Wire Transfer - Transfer must be made to Torontech and confirmed for the full purchase amount (merchandise, handling and shipping) prior to shipment. Please contact us by phone at 1.877.884.TEST (8378)(outside U.S. +1.905.944.9825) or by fax at +1.954.697.8211 for bank information.
C. Open Account - Available to U.S.A. and Canadian customers only. Terms on open accounts are Net 30 days from date of shipment. Torontech WorldWide reserves the right to refuse shipment of new orders if any unpaid invoices are older than 30 days. Purchasers may apply for an open account by providing:
their bank information
3 credit references from other suppliers
Please allow 5 business days for confirmation of credit and creation of an open account.
Return Policy:
Torontech WorldWide may accept return of purchased merchandise within North America for refund or credit under the following conditions -
- There may be an additional restocking fee charged to the transaction if items are already shipped to customer.
- Goods must be returned to Torontech WorldWide within 5 days of the date of the receipt of the purchased goods.
- All freight, duties, customs, and other related shipping charges for the returned merchandise are borne by the purchaser. Shipments made freight collect will be refused.
- Merchandise must be returned properly packaged in brand new, salable condition, along with original packaging and all documentation, accessories and certificates.
- Purchaser has confirmed return authorization directly with Torontech.
- Merchandise is regular catalog item. Special order items can not be returned.
- All returned merchandise is subject to inspection by Torontech. Torontech reserves the right to refuse return of any merchandise that is used, damaged, or not part of the current published price list. In the case Torontech does not accept the returned merchandise, reasonable attempts will be made to notify the Buyer and the merchandise will be returned to Buyer as they were received by Torontech. Damaged merchandise that can be restored to original condition and thus accepted for return will be evaluated on an individual basis. The purchaser will be advised of additional expenses for the repair and restoration of the returned item. After approval, these expenses will be charged to the purchaser in addition to the restocking fee.
Change of Terms:
The acceptance of any order by Torontech WorldWide is subject to purchaser's assent to all of the terms and conditions set forth herein. Purchaser's assent to these terms and conditions shall be presumed from the purchaser's placement of an order through the Torontech. Any and all other terms and conditions are expressly rejected, and no addition or modification of terms and conditions shall be binding without the prior agreement of Torontech WorldWide in writing.
Complete Agreement:
The terms and conditions in the Torontech web site, incorporated herein by reference, including forms, acknowledgements, quotations, invoices and sales terms and conditions constitute the entire and exclusive agreement between the purchaser and Torontech WorldWide
Information:
Torontech Inc makes every effort to insure the accuracy of the product information displayed on its web sites, but makes no warranties, expressed or implied, as to the accuracy of the data portrayed on the web sites. Torontech Inc reserves the right to change product information, including pricing information at any time without notice.
Trademarks and Copyrights:
The WorldofTest.com Torontech contains trademarked product names. Product names are not to be reproduced or used in any fashion by any party other than Torontech without the express written consent of Torontech International Inc.. All pictures, descriptions, and other content of this web site are copyrighted by Torontech Inc and may not be used without the express written permission of Torontech Inc. Purchaser acknowledges that they have no right, title, or interest in the trademarks or copyrights in the products, and purchaser covenants that it will take no action to register or otherwise interfere with such rights. Please contact us with any requests for permission or questions about our trademarks.
Warranty Disclaimer:
No warranty or affirmation of fact, express or implied, other than expressly set forth herein is made or authorized by Torontech Inc. Torontech Inc disclaims any and all liability for product defect claims. Torontech Inc does not express or imply a warranty that any product on the web site(s) is fit for a particular purpose. Torontech Inc honors the product warranty as published and made available by Torontech Inc. Warranty claims for products not manufactured by Torontech are the responsibility of the manufacturer. Torontech Inc will always make its best good faith effort to resolve warranty claims.
Force Majeure:
Torontech Inc shall not be liable for any delay in or impairment of performance resulting in whole or in part from Acts of God, service interruptions, labor disruptions, insurrections, governmental decrees or controls, war risks, severe weather, supplies or raw materials, inability to procure or ship products, inability to obtain permits and/or licenses, or any other circumstances or causes beyond the control of Torontech Inc in the conduct of its business.
Torontech Inc Privacy Policy
I. What legal provisions govern our data processing practices? How and from where (internal/external sources) is personal data acquired? What are the rights of the user (web site visitor/registered customer)?
1. General
As a general principle, no personal details need to be provided when visiting our Internet site. Data made available to us by you is treated in strict confidence and in accordance with the provisions of the Federal Data Protection Act. With a few exceptions (see point 2 below), our web server only registers non-personal (anonymous) data concerning the use of our site. Specifically, the log files of our web server, as a general rule, only contain the user's IP address, the last page visited by the user, the browser used, date, time and the file requested. This anonymous data, however, does not permit conclusions to be drawn about the individual users, and merely serves to prepare statistics on the use of our Internet site for the purpose of its improvement. At the same time, great importance is placed on ensuring that usage data is not linked with personal data.
2. Personal data
Person-related data (personal data) is only used if the newsletter is ordered (by email), product(s) is (are) ordered, or to supply product information. We undertake to use the personal data entrusted to us only for the purposes stated. Purchase history is retained for assistance with future customer needs.
II. What security measures are used to protect personal data? What are the user's options for processing personal data?
3. Technical measures
Databases are optimally protected against third party access, loss, misuse and falsification through the use of appropriate technical means. In order to determine the popularity of individual topic areas, cookies are used in those sections. These text files are stored on your hard disk and facilitate your use of our Internet site. Thanks to these cookies, there is no need for specific registration each time you visit a section requiring registration, and we can supply you with the personalized contents you request.
It is for you to decide whether you want to work with cookies and, if so, which kind (permanently stored on the hard disk or only placed for the time of the browser activity). However, we draw your attention to the fact that access to fields requiring registration is only possible with activated cookies.
III. What data is communicated to third parties and for what purposes?
4. Communication of personal data
Personal data entrusted to us by you is not communicated, leased or sold to third parties.
IV. Which department answers questions about the processing of personal data?
5. Contact
In the light of the rapid technical developments in connection with the Internet, we make every effort to constantly improve our Internet site and technical precautions, including those connected with data protection. We will keep you suitably informed about such measures. Any changes will be published here. Further information is available at any time by contacting Torontech Inc.
Disclaimer of liability Torontech Inc shall not be liable for direct, indirect or consequential losses resulting from or in connection with access to, use of or queries to the Torontech web site or its links with other web sites, even if Torontech Inc has previously been informed of the possibility of such losses. No guarantee is provided as to the accuracy of the information disseminated via the Torontech Inc web site. In addition, Torontech Inc guarantees neither the reliability nor the completeness of the information contained on its web site. The information made available on the Torontech and WorldofTest.com web site may be amended at any time without prior notice. In particular, Torontech Inc shall not be liable for losses caused by transmission errors, technical faults and interruptions, breakdowns or an unlawful interference with the user's data processing system or the generally accessible systems and transmission networks. Nor shall Torontech Inc be liable for losses resulting from breakdowns, interruptions or overloads occurring to any data processing systems. If certain links are activated on the Torontech and WorldofTest.com web site, the user may under certain circumstances leave the Torontech web site. Torontech Inc assumes no responsibility for the contents, products or services offered or other information or offers contained on these linked web sites.
