High-Vacuum, Double-Magnetron Target Sputter Coater/ ThermalEvaporator-DST2-TG
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High-Vacuum Double-Magnetron Target Sputter Coater / Thermal Evaporator – DST2-TG
The DST2-TG, also known as the Double Target Turbo Pumped Sputter Coater and Thermal Evaporator, is an advanced coating system that combines thermal evaporation and sputter coating in one compact desktop unit. Operators can control the system remotely over a Wi-Fi connection, using either the built-in touch screen or a PC.
Applications
This Magnetron Desk Sputter Coater has a roomy 300 mm diameter chamber and two water-cooled 2" cathodes, which makes it well suited to long deposition runs. It works as a single platform for sputtering, carbon fiber deposition, and metal evaporation.
Designed specifically for glove box installation, the unit can sputter semiconductors, dielectrics, and metal targets. Sputtering cathodes and thermal evaporation boats can be fitted either interchangeably or at the same time, giving access to a total of three deposition sources. Carbon deposition is also possible using carbon fiber, which widens the range of materials the system can handle.
This precision vacuum coating system can run in semi-automated or fully automated mode. A 7" color touch-screen panel lets users control and adjust deposition process data, and the intuitive software keeps operation simple. The same control panel window can be opened on a PC over Wi-Fi.
Vacuum levels and coating sequence information can be monitored and shown as digital readouts or curves on the touch screen. The history page also stores and displays the last 300 coatings.
Product: DST2-TG Touch Screen Vacuum Coater
The sputter coater and thermal evaporator for glove box applications can be upgraded with the following optional facilities:
- An RF power supply with an auto-adjustable matching box, which minimizes reflected power during RF sputtering.
- A plasma cleaner, which removes organic matter from the substrate surface before thin film deposition.
Features and Advantages
- Combined sputter coater and thermal evaporator designed for glove box mounting
- Built-in turbomolecular pump for efficient vacuum performance
- Spacious chamber, 30 cm in diameter with a height range of 20–25 cm
- Quick, simple target installation with no target holder needed
- Improved heat conduction through targets fitted with backing plates
- Rotating sample holder for uniform coating
- KF40 feedthroughs on the glove box for power supplies (DC, RF, and high current), the vacuum pump hose, water cooling, argon and reactive gas connections, and electrical connections
- Precise gas injection control through Mass Flow Controllers (MFCs)
- Two high-precision quartz crystal thickness sensors for accurate film thickness monitoring
- Vac Coat products carry comprehensive worldwide public and product liability insurance, protecting against property damage or personal injury resulting from the use of Vac Coat systems
Automation Features
- Semi/Fully Automatic Coating Process (Optional): Users can choose automated or semi-automated coating, matching the level of automation to their needs.
- Efficient Data Entry and Storage: Deposition process parameters can be entered quickly to streamline workflow, and process data is stored securely for easy retrieval and reference.
- Remote Process Control: The deposition process can be controlled and monitored remotely from a PC over Wi-Fi, for added convenience and flexibility.
- Coating Recipe Storage: Coating recipes can be saved so specific deposition processes can be repeated with consistent, reproducible results.
- Electronic Shutters: Electronic shutters give precise control over the coating process and manage substrate exposure during deposition.
- Automated Cathode Selection: Cathodes are selected automatically, which streamlines operation and sets optimal deposition conditions for each material.
Optional Facilities
- RF Sputtering for Non-Conducting Targets (Optional): RF sputtering capability enables deposition from non-conducting targets, extending the range of coatable materials.
- Plasma Cleaner (Optional): A plasma cleaner removes organic matter from the substrate surface before thin film deposition, providing a clean substrate for superior coating quality.
Theory and Method
The system operates in a high vacuum environment and can deposit a wide variety of materials, making it a dependable choice for diverse coating applications. The double magnetron target desk sputter coater switches smoothly between evaporation and sputtering deposition, so complex multilayer coatings can be produced.
The DST2-TG is an all-in-one solution that brings efficiency and precision to coating work in a glove box setting.
Glove box systems provide a protected environment for delicate materials, preventing exposure to air, moisture, and unwanted interactions. The DST2-TG high-vacuum coating system, integrated with a glove box, allows substrates to be handled safely and cleanly before or after deposition, all within an inert gas atmosphere. This configuration gives a tightly controlled chamber environment for accurate deposition of ultra-pure thin layers under high vacuum conditions.
Important Delivery Information
Delivery time varies upon stock availability. Our standard dispatch and shipping times are generally within 1 week, however for some high demand items the delivery may be extended to 2-3 weeks.
Need it urgently? Contact us here to check stock and organize faster shipping.
Orders:
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Shipping outside of the U.S.A.:
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Return Policy:
Torontech WorldWide may accept return of purchased merchandise within North America for refund or credit under the following conditions -
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- Merchandise is regular catalog item. Special order items can not be returned.
- All returned merchandise is subject to inspection by Torontech. Torontech reserves the right to refuse return of any merchandise that is used, damaged, or not part of the current published price list. In the case Torontech does not accept the returned merchandise, reasonable attempts will be made to notify the Buyer and the merchandise will be returned to Buyer as they were received by Torontech. Damaged merchandise that can be restored to original condition and thus accepted for return will be evaluated on an individual basis. The purchaser will be advised of additional expenses for the repair and restoration of the returned item. After approval, these expenses will be charged to the purchaser in addition to the restocking fee.
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